BProtocols Plasma Cleaner
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This protocol is for the older plasma cleaner, the one against the glass wall/door.
- Turn on the oxygen flow on the wall to the right.
- Turn on the mechanical pump on the right table leg. Make sure to turn this off afterwards, as it will overheat, mess up the equipment, and possibly blow a cleanroom fuse.
- Make a dry run (with nothing inside) to ensure that the settings are correct.
- Set the timer to 30 seconds or so, so that you have time to play with the settings. Press start. It will take about a minute to pump a vacuum, down to around .180 Torr. At this point, the oxygen flow will begin, causing the pressure to jump. After pumping more vacuum, down to around .600 Torr, the plasma will ignite. The timer will now start counting down.
- Set the wattage switch to forward. Use the control knob to get it to 100W. Set the wattage switch to reflected. Use the RF knob on the top right of the machine to bring it down to 0W.
- Open the door and insert the wafers. Make sure that the glass is secure against the gasket and that the chips in the glass won't prevent a vacuum. If you have problems pumping a vacuum, the glass is the first thing to check.
- Set the timer for 70 seconds and start it up. Monitor it to make sure that the forward and reflected wattages are proper.
- Turn off the mechanical pump.
- Turn off the oxygen flow.
- Turn off the power on the machine.
